TY  - BOOK
AU  - Auciello,Orlando
AU  - Krauss,Alan R.
TI  - In situ real-time characterization of thin films
SN  - 0471241415
AV  - QC176.83  .I57 2001
PY  - 2001///
CY  - New York
PB  - John Wiley
KW  - Thin films
N1  - A Wiley-Interscience Publication
ER  -