Process technology for silicon carbide devices / 
edited by Carl-Mikael Zetterling. 
 - xxi, 216 pages :  illustrations ;  25cm. 
 - EMIS processing series ;  no. 2 .
<br/><br/><label>ISBN: </label>0852969988 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon carbide --Electric properties.
<br/><br/><label>LC Class. No.: </label>TP261   / .P76 2002