TY  - BOOK
AU  - Zetterling,Carl-Mikael
ED  - Institution of Electrical Engineers.
TI  - Process technology for silicon carbide devices
T2  - EMIS processing series
SN  - 0852969988
AV  - TP261  .P76 2002
PY  - 2002///
CY  - London
PB  - Institution of Electrical Engineers
KW  - Silicon carbide
KW  - Electric properties
ER  -