Santos, Hector De Los. ,
Principles and applications of nanomems physics /
Hector De Los Santos.
- xv, 254 pages : illustrations ; 24 cm.
- Microsystems ; 15 .
1402032382
Quantum electronics.
Wave-particle duality.
Nanotechnology.
Microelectromechanical systems.
QC688 / .S26 2005