TY  - BOOK
AU  - Santos,Hector De Los
TI  - Principles and applications of nanomems physics
T2  - Microsystems
SN  - 1402032382
AV  - QC688  .S26 2005
PY  - 2005///
CY  - New York
PB  - Springer
KW  - Quantum electronics
KW  - Wave-particle duality
KW  - Nanotechnology
KW  - Microelectromechanical systems
ER  -