Mack, Chris A. , <br/><br/>
Field guide to optical lithography / 
Chris A. Mack. 
 - xii, 122 pages :  illustrations ;  21 cm. 
 - SPIE field guides ;  FG06 .
<br/><br/><label>ISBN: </label>0819462071 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits --Design and construction.<br/>Microlithography.
<br/><br/><label>LC Class. No.: </label>TK7874   / .M32 2006