TY  - BOOK
AU  - Mack,Chris A.
TI  - Field guide to optical lithography
T2  - SPIE field guides
SN  - 0819462071
AV  - TK7874  .M32 2006
PY  - 2006///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits
KW  - Design and construction
KW  - Microlithography
ER  -