Dziuban, J. A.. , Bonding in microsystem technology / J. A. Dziuban. - xviii, 331 pages : illustrations ; 25 cm. - Springer series in advanced microelectronics ; 24 . ISBN: 9781402045783 1402045786 Subjects--Topical Terms: Microtechnology.Micromachining. LC Class. No.: TK7874 / .D94 2006