Zhang, G. Q.. , <br/><br/>
Mechanics of microelectronics / 
G. Q. Zhang, W. D. van Driel and  X J Fan. 
 - xiii, 563 pages :  illustrations ;  25 cm. 
 - Solid mechanics and its applications ;  v. 141 .
<br/><br/><label>ISBN: </label>140204934X 9781402049347 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Mechanical engineering.
<br/><br/><label>LC Class. No.: </label>TK7874   / .Z42 2006