TY  - BOOK
AU  - Zhang,G.Q..
AU  - van Driel,W.D.
AU  - Fan,X.J.
TI  - Mechanics of microelectronics
T2  - Solid mechanics and its applications
SN  - 140204934X
AV  - TK7874  .Z42 2006
PY  - 2006///
CY  - Dordrecht
PB  - Springer
KW  - Microelectronics
KW  - Mechanical engineering
ER  -