TY  - BOOK
AU  - Alford,Terry L.
AU  - Feldman,Leonard C.
AU  - Mayer,James W.
TI  - Fundamentals of nanoscale film analysis
SN  - 0387292608
AV  - QC176.83  .A43 2006
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Thin films
KW  - Nanostructured materials
ER  -