TY  - BOOK
AU  - Vant Zant,Peter
TI  - Microchip fabrication: a practical guide to semiconductor processing 
SN  - 0070672504
AV  - TK7874  .V36 2000
PY  - 2000///
CY  - New York
PB  - McGraw-Hill
KW  - Semiconductors
KW  - Design and construction
ER  -