Mack, Chris. , <br/><br/>
Fundamental principles of optical lithography :  the science of microfabrication / 
Chris Mack. 
 - xvii, 515 pages :  illustrations ;  25 cm. 
<br/><br/><label>ISBN: </label>0470018933 9780470018934 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits --Design and construction.<br/>Microlithography --Industrial applications.
<br/><br/><label>LC Class. No.: </label>TK7874   / .M324 2007