TY  - BOOK
AU  - Mack,Chris
TI  - Fundamental principles of optical lithography: the science of microfabrication 
SN  - 0470018933
AV  - TK7874  .M324 2007
PY  - 2007///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Integrated circuits
KW  - Design and construction
KW  - Microlithography
KW  - Industrial applications
ER  -