TY  - BOOK
AU  - Chang, C Y.
AU  - Sze, S M.
TI  - ULSI technology
SN  - 0071141057
AV  - TK7874  .U47 1996
PY  - 1996///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Very large scale integration
ER  -