Solgaard, Olav. , <br/><br/>
Photonic microsystems :  micro and nanotechnology applied to optical devices and systems / 
Olav Solgaard. 
 - xvi, 631 pages :  illustrations ;  24 cm. 
 - MEMS reference shelf .
<br/><br/><label>ISBN: </label>9780387290225 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Photonics.<br/>Optoelectronic devices --Design and construction.<br/>Optical communications.
<br/><br/><label>LC Class. No.: </label>TK7875   / .S64 2009