Paik, Ungyu. , <br/><br/>
Nanoparticle engineering for chemical-mechanical planarization :  fabrication of next-generation nanodevices / 
Ungyu Paik, Jea-Gun Park. 
 - xiii, 191 pages, [14] pages of plates :  illustrations (some color) ;  25 cm. 
<br/><br/><label>ISBN: </label>9781420059113 1420059114 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical mechanical planarization.<br/>Nanoparticles.<br/>Nanoelectronics.
<br/><br/><label>LC Class. No.: </label>TK7874.84   / .P34 2009