TY  - BOOK
AU  - Hosaka,Hiroshi
TI  - Micro-optomechatronics
T2  - Optical engineering
SN  - 0824759834
AV  - TK7875  .M53 2005
PY  - 2005///
CY  - New York
PB  - Marcel Dekker
KW  - Microelectromechanical systems
KW  - Mechatronics
KW  - Nanotechnology
KW  - Optoelectronic devices
ER  -