Electroceramic-based MEMS :  fabrication-technology and applications / 
edited by Nava Setter. 
 - xii, 414 pages :  illustrations ;  24 cm. 
 - Electronic materials : science and technology .
<br/><br/><label>ISBN: </label>0387233105 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875   / .E53 2005