TY  - BOOK
AU  - Cheung,Rebecca
TI  - Silicon carbide microelectromechanical systems for harsh environments
SN  - 1860946240
AV  - TK7875  .S54 2006
PY  - 2006///]
CY  - London
PB  - Imperial College Press
KW  - Microelectromechanical systems
KW  - Silicon carbide
ER  -