Varadan, V. K.. , Smart material systems and MEMS : design and development methodologies / Vijay K. Varadan, K. J. Vinoy and S. Gopalakrishnan. - xii, 404 pages : illustrations ; 26 cm. ISBN: 0470093617 9780470093610 Subjects--Topical Terms: Microelectromechanical systems.Smart materials. LC Class. No.: TK7875 / .V374 2006