TY  - BOOK
AU  - Varadan,V.K..
AU  - Vinoy,K.J.
AU  - Gopalakrishnan,S.
TI  - Smart material systems and MEMS: design and development methodologies 
SN  - 0470093617
AV  - TK7875  .V374 2006
PY  - 2006///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - Smart materials
ER  -