TY  - BOOK
AU  - Sree Harsha,K.S..
TI  - Principles of physical vapor deposition of thin films
SN  - 008044699X
AV  - QC176.83  .S73 2006
PY  - 2006///
CY  - Amsterdam
PB  - Elsevier
KW  - Thin films
KW  - Vapor-plating
ER  -