TY  - BOOK
AU  - Hesketh,Peter J.
TI  - BioNanoFluidic MEMS
T2  - Microsystems
SN  - 0387462813
AV  - TK7875  .B56 2008
PY  - 2008///
CY  - Berlin
PB  - Springer
KW  - Microelectromechanical systems
KW  - Nanotechnology
KW  - Biotechnology
ER  -