Reliability of MEMS / 
edited by Osamu Tabata and Toshiyuki Tsuchiya. 
 - xx, 303 pages :  illustrations ;  25 cm. 
 - Advanced micro & nanosystems ;  v.6 .
<br/><br/><label>ISBN: </label>3527314946 9783527314942 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems --Reliability.
<br/><br/><label>LC Class. No.: </label>TK7875   / .R42 2008