TY  - BOOK
AU  - Rossnagel,Stephen M.
AU  - Cuomo,Jerome J.
AU  - Westwood,William D.
TI  - Handbook of plasma processing technology: fundamentals, etching, deposition and surface interactions 
T2  - Materials science and process technology series
SN  - 9780815512202
AV  - TA2020  .H36 1990
PY  - 1990///
CY  - New York
PB  - Noyes Publications
KW  - Plasma engineering
KW  - Semiconductors
KW  - Etching
KW  - Plasma etching
ER  -