Lieberman, Michael A. , <br/><br/>
Principles of plasma discharges and materials processing / 
Michael A. Lieberman, Allan J. Lichtenberg. 
 - 2nd ed. 
 - xxxiv, 757 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>9780471720010 0471720011 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma dynamics.<br/>Thin films --Surfaces.<br/>Plasma etching.<br/>Plasma chemistry.
<br/><br/><label>LC Class. No.: </label>QC718.5.D9   / .L53 2005