TY  - BOOK
AU  - Lieberman,Michael A.
AU  - Lichtenberg,Allan J.
TI  - Principles of plasma discharges and materials processing
SN  - 9780471720010
AV  - QC718.5.D9  .L53 2005
PY  - 2005///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Plasma dynamics
KW  - Thin films
KW  - Surfaces
KW  - Plasma etching
KW  - Plasma chemistry
ER  -