Chapman, Brian. , <br/><br/>
Glow discharge processes :  sputtering and plasma etching / 
Brian Chapman. 
 - xv, 406 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>047107828X 9780471078289 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sputtering (Physics).<br/>Glow discharges.<br/>Plasma etching.
<br/><br/><label>LC Class. No.: </label>QC702.7.P6   / .C42 1980