TY  - BOOK
AU  - Chapman,Brian
TI  - Glow discharge processes: sputtering and plasma etching 
SN  - 047107828X
AV  - QC702.7.P6  .C42 1980
PY  - 1980///
CY  - New York
PB  - John Wiley
KW  - Sputtering (Physics)
KW  - Glow discharges
KW  - Plasma etching
ER  -