Hsu, Tai-Ran. , <br/><br/>
MEMS and microsystems :  design, manufacture and nanoscale engineering / 
Tai-Ran Hsu. 
 - 2nd ed. 
 - xxv, 550 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>9780470083017 0470083018 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.<br/>Microelectronic packaging.
<br/><br/><label>LC Class. No.: </label>TK7874   / .H78 2008