TY  - BOOK
AU  - Irene,Eugene A.
TI  - Surfaces, interfaces, and thin films for microelectronics
SN  - 0470174471
AV  - QD506  .I73 2008
PY  - 2008///
CY  - Hoboken, NJ
PB  - Wiley-Interscience
KW  - Surface chemistry
KW  - Interfaces (Physical sciences)
KW  - Thin films
KW  - Microelectronics
KW  - Materials
ER  -