Baglio, S.. , <br/><br/>
Scaling issues and design of MEMS / 
Salvatore Baglio, Salvatore Castorina, Nicolo Savalli. 
 - xiii, 229 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>9780470016992 047001699X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems --Design and construction.
<br/><br/><label>LC Class. No.: </label>TK7875   / .B33 2007