TY  - BOOK
AU  - Baglio,S..
AU  - Castorina,Salvatore
AU  - Savalli,Nicol
TI  - Scaling issues and design of MEMS
SN  - 9780470016992
AV  - TK7875  .B33 2007
PY  - 2007///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - Design and construction
ER  -