TY  - BOOK
AU  - Liu,Aiqun
ED  - International Conference on Materials for Advanced Technologies :
TI  - MEMS technology and devices
SN  - 9812709606
AV  - TK7875  .I57 2007
PY  - 2007///
CY  - Singapore
PB  - Pan Stanford Publishing
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Nanostructured materials
ER  -