Kaltenbacher, Manfred. , <br/><br/>
Numerical simulation of mechatronic sensors and actuators / 
Manfred Kaltenbacher. 
 - 2nd ed. 
 - xviii, 428 pages :  illustrations ;  25 cm. 
<br/><br/><label>ISBN: </label>354071359X 9783540713593 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Mechatronics.
<br/><br/><label>LC Class. No.: </label>TK7875   / .K34 2007