Gerlach, Gerald. , <br/><br/>
Introduction to microsystem technology :  a guide for students / 
Gerald Gerlach, Wolfram Dotzel ; translated by Dorte Muller. 
 - xxiii, 351 pages :  illustrations ;  26 cm. 
<br/><br/><label>ISBN: </label>9780470058619 0470058617 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems --Design and construction.<br/>System design.<br/>Microelectronics.
<br/><br/><label>LC Class. No.: </label>TK7875   / .G47 2008