Micro process engineering :  a comprehensive handbook / 
Volker Hessel ... [and others]. 
 - 3 volume :  illustrations ;  25 cm. 
<br/><br/>v. 1. Fundamentals, operations and catalysts -- volume 2. Devices reactions and applications -- volume 3. System, process and plant engineering 
<br/><br/><label>ISBN: </label>3527315500 9783527315505 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Production engineering.<br/>Microtechnology.
<br/><br/><label>LC Class. No.: </label>TS176   / .M52 2009