TY  - BOOK
AU  - Hessel,Volker
TI  - Micro process engineering: a comprehensive handbook 
SN  - 3527315500
AV  - TS176  .M52 2009
PY  - 2009///
CY  - Chichester
PB  - Wiley-VCH
KW  - Production engineering
KW  - Microtechnology
N1  - v. 1. Fundamentals, operations and catalysts -- volume 2. Devices reactions and applications -- volume 3. System, process and plant engineering
ER  -