VLSI micro- and nanophotonics :  science, technology, and applications / 
edited by El-Hang Lee ... [et al.] 
 - Boca Raton, FL :  CRC Press,  2011 
 - 1 v. (various pagings) :  ill. ;  26 cm. 
<br/><br/><label>ISBN: </label>9781574447293 1574447297 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems --Technological innovarions<br/>Nanophotonics --Technological innovations<br/>Integrated circuits --Very large scale integration
<br/><br/><label>LC Class. No.: </label>TK7875  / .V57 2011