TY  - BOOK
AU  - Lee,El-Hang
TI  - VLSI micro- and nanophotonics: science, technology, and applications 
SN  - 9781574447293
AV  - TK7875 .V57 2011
PY  - 2011///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Technological innovarions
KW  - Nanophotonics
KW  - Technological innovations
KW  - Integrated circuits
KW  - Very large scale integration
ER  -