TY  - BOOK
AU  - Chiao,Mu
AU  - Chiao,J.C.
TI  - Biomaterials for MEMS
SN  - 9789814241465
AV  - TK7875  .B57 2011
PY  - 2011///
CY  - Singapore
PB  - Pan Stanford
KW  - Microelectromechanical systems
KW  - Biomedical materials
ER  -