TY  - BOOK
AU  - Liu,Chang
TI  - Foundations of MEMS
SN  - 9780132497367
AV  - TK7875  .L58 2012
PY  - 2012///
CY  - Upper Saddle River, N.J.
PB  - Prentice Hall
KW  - Microelectromechanical systems
ER  -