Mems linear and nonlinear statics and dynamics /
Mohammad I. Younis.
- New York : Springer, 2011.
- xv, 453 p. : ill. ; 24 cm.
- Microsystems ; v. 20 .
9781441960191 1441960198
Microelectromechanical systems --Mathematical models. Statics --Mathematical models. Dynamics --Mathematical models.