MEMS :  design and fabrication / 
edited by Mohamed Gad-el-Hak. 
 - 2nd ed. 
 - 1 volume (various pagings) :  illustrations ;  26 cm. 
 - The MEMS handbook .
<br/><br/> One of three parts whose previous edition was a published as a single volume. 
<br/><br/><label>ISBN: </label>0849391385 0849321069 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems --Design and construction.<br/>Microfabrication.
<br/><br/><label>LC Class. No.: </label>TK7875   / .M49 2006