NEMS/MEMS technology and devices :  selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July, Singapore / 
edited by Selin Teo ... [and others]. 
 - xi, 348 pages :  illustrations ;  25 cm. 
 - Advanced materials research,   v. 74  1022-6680 ; .
<br/><br/><label>ISBN: </label>9780878493210 0878493212 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses.<br/>Nanoelectromechanical systems--Congresses.
<br/><br/><label>LC Class. No.: </label>TK7875   / .N45 2009