Micro and smart systems :  technology and modeling / 
G.K. Ananthasuresh ... [and others]. 
 - xxi, 474 pages :  illustrations ;  27 cm. 
<br/><br/><label>ISBN: </label>0470919396 9780470919392 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Intelligent control systems--Design and construction.<br/>Technology and engineering --Electronics --Microelectronics.
<br/><br/><label>LC Class. No.: </label>TK7875   / .M52 2012