TY  - BOOK
AU  - Jones,Thomas Byron
AU  - Nenadic,Nenad G.
TI  - Electromechanics and MEMS
SN  - 0521764831
AV  - TK7875  .J66 2012
PY  - 2012///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Microelectromechanical systems
KW  - Technology and engineering
KW  - Electronics
KW  - Optoelectronics
ER  -