Shul, R.J.. , <br/><br/>
Handbook of advanced plasma processing techniques / 
R.J. Shul, S.J. Pearton (editions.). 
 - xvi, 653 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>3540667725 9783540667728 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering.<br/>Electronic circuits.<br/>Integrated circuits--Design and construction.<br/>Plasma etching.
<br/><br/><label>LC Class. No.: </label>TA2020   / .S58 2000