TY  - BOOK
AU  - Shul,R.J..
AU  - S.J.Pearton
TI  - Handbook of advanced plasma processing techniques
SN  - 3540667725
AV  - TA2020  .S58 2000
PY  - 2000///
CY  - Berlin
PB  - Springer
KW  - Plasma engineering
KW  - Electronic circuits
KW  - Integrated circuits
KW  - Design and construction
KW  - Plasma etching
ER  -